Low-temperature growth of carbon nanotube by plasma-enhanced chemical vapor deposition using nickel catalyst

被引:0
|
作者
Ryu, Kyoungmin [1 ]
Kang, Mihyun [1 ]
Kim, Yangdo [2 ]
Jeon, Heyongtag [1 ]
机构
[1] Division of Mat. Sci. and Eng., Hanyan University, Seoul 133-791, Korea, Republic of
[2] Sch. of Mat. Sci. and Engineering, Pusan National University, Pusan 609-735, Korea, Republic of
关键词
D O I
10.1143/jjap.42.3578
中图分类号
学科分类号
摘要
12
引用
收藏
页码:3578 / 3581
相关论文
共 50 条
  • [41] Growth of carbon nanotubes using microwave plasma-enhanced chemical vapor deposition process
    Liu, RM
    Ting, JM
    MATERIALS CHEMISTRY AND PHYSICS, 2003, 82 (03) : 571 - 574
  • [42] Analyses of early stages of vertically aligned carbon nanotube growth by plasma-enhanced chemical vapor deposition
    Hayashi, Y
    Watanabe, Y
    Ueda, K
    Nishino, S
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2005, 44 (4A): : 1549 - 1553
  • [43] Hydrogen-mediated low-temperature epitaxy of Si in plasma-enhanced chemical vapor deposition
    Kitagawa, T
    Kondo, M
    Matsuda, A
    APPLIED SURFACE SCIENCE, 2000, 159 : 30 - 34
  • [44] Film characteristics of low-temperature plasma-enhanced chemical vapor deposition silicon dioxide using tetraisocyanatesilane and oxygen
    Idris, Irman
    Sugiura, Osamu
    Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1998, 37 (12 A): : 6562 - 6568
  • [45] Film characteristics of low-temperature plasma-enhanced chemical vapor deposition silicon dioxide using tetraisocyanatesilane and oxygen
    Idris, I
    Sugiura, O
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (12A): : 6562 - 6568
  • [46] On the low-temperature growth mechanism of single walled carbon nanotubes in plasma enhanced chemical vapor deposition
    Shariat, M.
    Shokri, B.
    Neyts, E. C.
    CHEMICAL PHYSICS LETTERS, 2013, 590 : 131 - 135
  • [47] Low-temperature growth of single-walled carbon nanotubes by plasma enhanced chemical vapor deposition
    Bae, EJ
    Min, YS
    Kang, D
    Ko, JH
    Park, W
    CHEMISTRY OF MATERIALS, 2005, 17 (20) : 5141 - 5145
  • [48] Electron microscopy studies of crystallites in carbon nanopillars grown by low-temperature plasma-enhanced chemical-vapor deposition
    Grishina Y.S.
    Borgardt N.I.
    Volkov R.L.
    Gromov D.G.
    Dubkov S.V.
    Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques, 2017, 11 (1) : 226 - 233
  • [49] Heteroepitaxial growth of Silicon on GaAs via low temperature plasma-enhanced chemical vapor deposition
    Hamon, G.
    Vaissiere, N.
    Lausecker, C.
    Cariou, R.
    Chen, W.
    Alvarez, J.
    Maurice, J. L.
    Patriarche, G.
    Largeau, L.
    Decobert, J.
    Kleider, J. P.
    Roca i Cabarrocas, P.
    QUANTUM SENSING AND NANO ELECTRONICS AND PHOTONICS XVI, 2019, 10926
  • [50] Growth of plasma-enhanced chemical vapour deposition and hot filament plasma-enhanced chemical vapour deposition transfer-free graphene using a nickel catalyst
    Othman, Maisara
    Ritikos, Richard
    Rahman, Saadah Abdul
    THIN SOLID FILMS, 2019, 685 : 335 - 342