Anomalous grain boundary and carrier transport in cat-CVD poly-Si films

被引:0
|
作者
Japan Advanced Inst of Science and, Technology, Ishikawa-ken, Japan [1 ]
机构
来源
J Non Cryst Solids | / Pt 2卷 / 1016-1020期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
下载
收藏
相关论文
共 50 条
  • [1] Anomalous grain boundary and carrier transport in cat-CVD poly-Si films
    Heya, A
    He, AQ
    Otsuka, N
    Matsumura, H
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1998, 227 : 1016 - 1020
  • [2] Study on cat-CVD poly-Si films for solar cell application
    Japan Advanced Inst of Science and, Technology, Ishikawa-ken, Japan
    Sol Energ Mater Sol Cells, 1-4 (279-285):
  • [3] Preparation of poly-Si films by Cat-CVD for thin film transistor
    Sunayama, H
    Yamada, K
    Karasawa, M
    Ishibashi, K
    THIN SOLID FILMS, 2003, 430 (1-2) : 226 - 229
  • [4] Study on cat-CVD poly-Si films for solar cell application
    Iiduka, R
    Heya, A
    Matsumura, H
    SOLAR ENERGY MATERIALS AND SOLAR CELLS, 1997, 48 (1-4) : 279 - 285
  • [5] Poly-Si films with long carrier lifetime prepared by rapid thermal annealing of Cat-CVD amorphous silicon thin films
    Ohdaira, Keisuke
    Abe, Yuki
    Fukuda, Makoto
    Nishizaki, Shogo
    Usami, Noritaka
    Nakajima, Kazuo
    Karasawa, Takeshi
    Torikai, Tetsuya
    Matsumura, Hideki
    THIN SOLID FILMS, 2008, 516 (05) : 600 - 603
  • [6] Formation of low-resistivity poly-Si and SiNx films by Cat-CVD for ULSI application
    Morimoto, R
    Yokomori, C
    Kikkawa, A
    Izumi, A
    Matsumura, H
    THIN SOLID FILMS, 2003, 430 (1-2) : 230 - 235
  • [7] Precursor Cat-CVD a-Si films for the formation of high-quality poly-Si films on glass substrates by flash lamp annealing
    Ohdaira, Keisuke
    Shiba, Kazuhiro
    Takemoto, Hiroyuki
    Fujiwara, Tomoko
    Endo, Yohei
    Nishizaki, Shogo
    Jang, Young Rae
    Matsumura, Hideki
    THIN SOLID FILMS, 2009, 517 (12) : 3472 - 3475
  • [8] Thin film poly-Si formation for solar cells by Flux method and Cat-CVD method
    Niira, K
    Hakuma, H
    Komoda, M
    Fukui, K
    Shirasawa, K
    SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2001, 69 (02) : 107 - 114
  • [9] Thin film poly-Si formation by Cat-CVD method and its application for solar cells
    Niira, K
    Senta, H
    Hakuma, H
    Komoda, M
    Okui, H
    Fukui, K
    Arimune, H
    Shirasawa, K
    THIN SOLID FILMS, 2001, 395 (1-2) : 315 - 319
  • [10] Thin film poly-Si solar cells using PECVD and Cat-CVD with light confinement structure by RIE
    Niira, K
    Senta, H
    Hakuma, H
    Komoda, M
    Okui, H
    Fukui, K
    Arimune, H
    Shirasawa, K
    SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2002, 74 (1-4) : 247 - 253