Effect of the Growth Conditions on the Perfection of Thick AlxGa1 - xAs Epitaxial Films.

被引:0
|
作者
Lozovskii, V.N.
Maronchuk, I.E.
Lunin, L.S.
Buddo, V.I.
Sushko, B.I.
Latuta, V.Z.
机构
来源
Neorganiceskie materialy | 1979年 / 15卷 / 11期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
It is shown that by zone recrystallization in the presence of a temperature gradient it is easy to prevent the supercooling characteristic of other methods of liquid epitaxy. By zone recrystallization in the presence of a gravitational field it is possible to obtain films with dislocation numbers less than 10**4cm** minus **2. The dislocation density concentration in thick Al//xGa//1// minus //xAs films obtained by zone recrystallization in the presence of either a temperature gradient or a gravitational field, if x less than 0. 2, depends mainly on the growth rate and zone thickness and weakly correlates with the dislocation density in the substrate.
引用
收藏
页码:1913 / 1917
相关论文
共 50 条
  • [41] Superstructured ordering in AlxGa1 − xAs and GaxIn1 − xP alloys
    P. V. Seredin
    P. Domashevskaya
    I. N. Arsentyev
    D. A. Vinokurov
    A. L. Stankevich
    T. Prutskij
    Semiconductors, 2013, 47 : 1 - 6
  • [42] Use of high-purity AlxGa1−xas layers in epitaxial structures for high-power microwave field-effect transistors
    K. S. Zhuravlev
    A. I. Toropov
    T. S. Shamirzaev
    A. K. Bazarov
    Yu. N. Rakov
    Yu. B. Myakishev
    Technical Physics Letters, 1999, 25 : 595 - 597
  • [43] FEATURES OF PHOTOLUMINESCENCE OF GERMANIUM-DOPED EPITAXIAL FILMS OF ALXGA1-XAS
    DOLGINOV, LM
    SHLENSKII, AA
    ROGULIN, VY
    FILLER, AS
    GIMELFAR.FA
    SOVIET PHYSICS SEMICONDUCTORS-USSR, 1972, 6 (05): : 824 - +
  • [44] Thick AlxGa1-xAs in GaAs/AlxGa1-xAs quantum wells: A leaky barrier
    Kim, DS
    Ko, HS
    Kim, YM
    Rhee, SJ
    Hong, SC
    Yee, DS
    Woo, JC
    Choi, HJ
    Ihm, J
    17TH CONGRESS OF THE INTERNATIONAL COMMISSION FOR OPTICS: OPTICS FOR SCIENCE AND NEW TECHNOLOGY, PTS 1 AND 2, 1996, 2778 : 729 - 730
  • [45] AlxGa1 – xAs/GaAs/AlxGa1 – x As Double Quantum Well with a Thin AlAs Interwell Barrier: Structural Characterization by SIMS and XRD
    A. M. Afanas'ev
    G. B. Galiev
    R. M. Imamov
    E. A. Klimov
    A. A. Lomov
    V. G. Mokerov
    V. V. Saraikin
    M. A. Chuev
    Russian Microelectronics, 2003, 32 (3) : 158 - 164
  • [46] SIMS investigations into the effect of growth conditions on residual impurity and silicon incorporation in GaN and AlxGa1−xN
    G. Parish
    S. Keller
    S. P. Denbaars
    U. K. Mishra
    Journal of Electronic Materials, 2000, 29 : 15 - 20
  • [47] STRUCTURE OF EPITAXIAL LAYERS OF ALXGA1-XAS
    DRANCHUK, SN
    ZAVADSKII, VA
    KAZAKOV, AI
    SHOBIK, VS
    INORGANIC MATERIALS, 1976, 12 (11) : 1678 - 1679
  • [48] Special features of electron scattering at AlxGa1−xAs/AlAs(001) interfaces
    S. N. Grinyaev
    G. F. Karavaev
    V. N. Chernyshov
    Semiconductors, 2003, 37 : 417 - 425
  • [49] Electroluminescent device based on AlxGa1−xAs–GaAs quantum well nanostructures
    M. Manimaran
    P.R. Vaya
    T. Kanayama
    Optical and Quantum Electronics, 2000, 32 : 1191 - 1199
  • [50] Pulsed laser deposition of AlxGa1–xAs and GaP thin films onto Si substrates for photoelectric converters
    L. S. Lunin
    M. L. Lunina
    O. V. Devitsky
    I. A. Sysoev
    Semiconductors, 2017, 51 : 387 - 391