Effect of the Growth Conditions on the Perfection of Thick AlxGa1 - xAs Epitaxial Films.

被引:0
|
作者
Lozovskii, V.N.
Maronchuk, I.E.
Lunin, L.S.
Buddo, V.I.
Sushko, B.I.
Latuta, V.Z.
机构
来源
Neorganiceskie materialy | 1979年 / 15卷 / 11期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
It is shown that by zone recrystallization in the presence of a temperature gradient it is easy to prevent the supercooling characteristic of other methods of liquid epitaxy. By zone recrystallization in the presence of a gravitational field it is possible to obtain films with dislocation numbers less than 10**4cm** minus **2. The dislocation density concentration in thick Al//xGa//1// minus //xAs films obtained by zone recrystallization in the presence of either a temperature gradient or a gravitational field, if x less than 0. 2, depends mainly on the growth rate and zone thickness and weakly correlates with the dislocation density in the substrate.
引用
收藏
页码:1913 / 1917
相关论文
共 50 条
  • [21] Structural characterization of interfaces in the AlxGa1−xAs/GaAs/AlxGa1−xAs heterostructures by high-resolution X-ray reflectometry and diffractometry
    A. A. Lomov
    A. G. Sutyrin
    D. Yu. Prokhorov
    G. B. Galiev
    Yu. V. Khabarov
    M. A. Chuev
    R. M. Imamov
    Crystallography Reports, 2005, 50 : 739 - 750
  • [22] Bipolar Heterojunction Transistors AlxGa1 - xAs/GaAs.
    Mroziewicz, Bohdan
    Malag, Andrzej
    Elektronika Warszawa, 1985, 26 (06): : 3 - 9
  • [23] MOVPE GROWN AlxGa1 - xAs/GaAs HETEROSTRUCTURES.
    Roberts, J.S.
    Chemtronics, 1987, 2 (02): : 78 - 82
  • [24] MEASUREMENT OF ABSOLUTE Al CONCENTRATION IN AlxGa1 - xAs.
    Yan, D.
    Farrell, J.Paul
    Lesser, P.M.S.
    Pollak, F.H.
    Kuech, T.F.
    Wolford, D.J.
    Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1986, B24-25 (pt 2 Apr III) : 662 - 666
  • [25] Width of the excitonic absorption line in AlxGa1 − xas alloys
    M. S. Markosov
    R. P. Seisyan
    Semiconductors, 2009, 43 : 629 - 634
  • [26] The effect of acoustic phonon confinement on electron scattering in GaAs/AlxGa1−xAs superlattices
    S. I. Borisenko
    Semiconductors, 2004, 38 : 824 - 829
  • [27] Piezoelectric microbeam resonators based on epitaxial AlXGa1-XAs films
    Li, LH
    Kumar, P
    DeVoe, DL
    MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) - 2003, 2003, : 307 - 310
  • [28] CONTROLLED ETCHING OF EPITAXIAL GaAs LAYERS AND SOLID AlxGa1 - xAs SOLUTIONS AND APPLICATION IN INTEGRATED OPTICS.
    Alferov, Zh.I.
    Gurevich, S.A.
    Mizerov, M.N.
    Portnoi, E.L.
    Soviet Physics, Technical Physics (English translation of Zhurnal Tekhnicheskoi Fiziki), 1975, 20 (12): : 1617 - 1619
  • [29] GROWTH AND DOPING CHARACTERISTICS OF AlxGa1 - xAs GROWN BY LPE AT 780 degree C.
    Yu, Jinzhong
    Iwai, S.
    Aoyagi, Y.
    Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors, 1985, 6 (02): : 123 - 127
  • [30] GROWTH AND DOPING CHARACTERISTICS OF AlxGa1 - xAs GROWN BY LPE AT 780 degree C.
    Yu, J.Z.
    Iwai, Sohachi
    Aoyagi, Yoshinobu
    Toyoda, Koichi
    Namba, Susumu
    1600, (78):