Effect of the Growth Conditions on the Perfection of Thick AlxGa1 - xAs Epitaxial Films.

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作者
Lozovskii, V.N.
Maronchuk, I.E.
Lunin, L.S.
Buddo, V.I.
Sushko, B.I.
Latuta, V.Z.
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Neorganiceskie materialy | 1979年 / 15卷 / 11期
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It is shown that by zone recrystallization in the presence of a temperature gradient it is easy to prevent the supercooling characteristic of other methods of liquid epitaxy. By zone recrystallization in the presence of a gravitational field it is possible to obtain films with dislocation numbers less than 10**4cm** minus **2. The dislocation density concentration in thick Al//xGa//1// minus //xAs films obtained by zone recrystallization in the presence of either a temperature gradient or a gravitational field, if x less than 0. 2, depends mainly on the growth rate and zone thickness and weakly correlates with the dislocation density in the substrate.
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页码:1913 / 1917
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