GROWTH OF GaAs MULTIPLE LAYER EPITAXIAL BY V. P. E. METHOD.

被引：0

作者：

Ogasawara, Kazuto

Shibatomi, Akihiro

Dazai, Koichi

机构：

来源：

Fujitsu Scientific and Technical Journal | 1976年 / 12卷 / 03期

关键词：

D O I：

暂无

中图分类号：

TN [电子技术、通信技术];

学科分类号：

0809 ;

摘要：

Multiple layer epitaxial structures (hi-lo, lo-hi-lo) were sequentially grown using vapor phase epitaxial growth of GaAs in a nitrogen atmosphere. Varying the epitaxial doping concentration in the same run improves the crystal quality of the epitaxial layer at the interface region rather than interrupting the growth process between differently doped layers in separate runs.

引用

页码：97 / 105

共 50 条

[1] The Ruined Existence (V. V. Rozanov and P. P. Pertsov in the Last Year of Their Correspondence) (Introduction, Editing and Comments by E. I. Goncharova)
Goncharova, E. I.
RUSSKAIA LITERATURA, 2019, (04): : 113 - 134
[2] Wheel of History: Correspondence between V. V. Rozanov and P. P. Pertsov, 1917 (Introduction, Editing and Comments by E. I. Goncharova)
Goncharova, E. I.
RUSSKAIA LITERATURA, 2017, (03): : 36 - 68
[3] The Method of Personal Knowledge in the Anthropology of V. E. Frankl
Dauder, J. U. A. N. F. E. R. N. A. N. D. O. SELLeS
Millan-ghisleri, Elda
PENSAMIENTO, 2024, 80 (308):
[4] The Innovation of P. E. Teaching Content and Method in College and University
Peng, Yanxia
2017 7TH INTERNATIONAL CONFERENCE ON EDUCATION AND SPORTS EDUCATION (ESE 2017), VOL 1, 2017, 79 : 110 - 114
[5] Centrum Industrial IT founds CIIT e. V. as a Foundation for further Growth
不详
ATP EDITION, 2016, (1-2): : 8 - 8
[6] Book Review: Gravitational Waves. By E. Ciufolini, V. Gorini, U. Moschella, P. Frè (Eds.)
Andrzej Królak
General Relativity and Gravitation, 2002, 34 (7) : 1171 - 1172
[7] Closure to Probability of Failure From Abnormal Load by Bruce Ellingwood, E. V. Leyendecker and James T. P. Yao (April, 1983)
Ellingwood, Brace
Leyendecker, E.V.
Yao, James T.P.
Journal of Structural Engineering (United States), 1984, 110 (04):
[8] A Forgotten Art Nouveau Play about the 18th Century (V Vek Ekateriny (In the Age of Catherine) by V. P. Burenin and F. E. Zarin)
Petrov, A. V.
Skvortsova, M. L.
RUSSKAIA LITERATURA, 2019, (03): : 154 - +
[9] Zhukovsky in the XXth century (Anisimova E. E. V. A. Zhukovsky's creation in receptive consciousness of Russian literature of the first part of the XXth century. Krasnoyarsk: SFU, 2016. 468 p.)
Kapinos, E. V.
SIBIRSKII FILOLOGICHESKII ZHURNAL, 2016, (04): : 272 - 280
[10] Epitaxial growth of GaSb on V-grooved Si (001) substrates with an ultrathin GaAs stress relaxing layer
Li, Qiang
Lai, Billy
Lau, Kei May
APPLIED PHYSICS LETTERS, 2017, 111 (17)

← 1 2 3 4 5 →