CO2 laser chemical vapor deposition of amorphous silicon. Gas phase processes and thin film properties

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[1] Golusda, E.
[2] Luehmann, K.-D.
[3] Mollekopf, G.
[4] Stafast, H.
[5] Wacker, M.
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Golusda, E. | 1600年 / 95期
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Silicon And Alloys;
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