Determination of hydrogen in 6H-SiC epitaxial layers by the 15N nuclear reaction analysis technique

被引：0
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作者：
Portmann, J. [1 ]
Haug, C. [1 ]
Brenn, R. [1 ]
Schneider, J. [2 ]
Rottner, K. [3 ]
Helbig, R. [3 ]
机构：
[1] Fac. of Phys. and Mat. Res. Center, Univ. Freiburg, Hermann-Herder-S., Freiburg, Germany
[2] Materials Research Center, University of Freiburg, D-79104, Freiburg, Germany
[3] Institute of Applied Physics, University Erlangen, D-91058, Erlangen, Germany
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1999年 / 155卷 / 01期
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页码：132 / 136
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