Zn and ZnO films deposited by ionized cluster beam and reaction ionized cluster beam techniques

被引:0
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作者
Yang, Qing [1 ]
Zhu, Yihua [1 ]
Pan, Xiaoren [1 ]
Ren, Zhogming [1 ]
He, Maoqi [1 ]
机构
[1] East China Univ of Science and, Technology, Shanghai, China
关键词
Ionized cluster beam - Reaction ionized cluster beam;
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(Edited Abstract)
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页码:75 / 79
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