Zn and ZnO films deposited by ionized cluster beam and reaction ionized cluster beam techniques

被引:0
|
作者
Yang, Qing [1 ]
Zhu, Yihua [1 ]
Pan, Xiaoren [1 ]
Ren, Zhogming [1 ]
He, Maoqi [1 ]
机构
[1] East China Univ of Science and, Technology, Shanghai, China
关键词
Ionized cluster beam - Reaction ionized cluster beam;
D O I
暂无
中图分类号
学科分类号
摘要
(Edited Abstract)
引用
收藏
页码:75 / 79
相关论文
共 50 条
  • [21] IONIZED-CLUSTER BEAM EPITAXY
    TAKAGI, T
    YAMADA, I
    MATSUBARA, K
    TAKAOKA, H
    JOURNAL OF CRYSTAL GROWTH, 1978, 45 (01) : 318 - 325
  • [22] IONIZED-CLUSTER BEAM DEPOSITION
    YAMADA, I
    SEMICONDUCTORS AND SEMIMETALS, 1984, 21 : 83 - 107
  • [23] METALLIZATION BY IONIZED CLUSTER BEAM DEPOSITION
    YAMADA, I
    TAKAGI, T
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1987, 34 (05) : 1018 - 1025
  • [24] IONIZED CLUSTER BEAM DEPOSITION TECHNIQUE
    YAMADA, I
    TAKAGI, T
    DENKI KAGAKU, 1984, 52 (07): : 417 - 421
  • [25] Contact fill by ionized cluster beam
    Ito, Hiroki, 1600, (31):
  • [26] STUDY OF THE IONIZED CLUSTER BEAM TECHNIQUE
    URBAN, FK
    ZAHN, MJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (03): : 1453 - 1457
  • [27] STUDY OF THE IONIZED CLUSTER BEAM TECHNIQUE
    URBAN, FK
    BERNSTEIN, A
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (03): : 537 - 541
  • [28] IONIZED-CLUSTER BEAM DEPOSITION
    TAKAGI, T
    YAMADA, I
    SASAKI, A
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (06): : 1128 - 1134
  • [29] CONTACT FILL BY IONIZED CLUSTER BEAM
    ITO, H
    KAJITA, N
    YOSHIDA, H
    INA, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1992, 31 (12B): : 4396 - 4402
  • [30] ON THE METAL CLUSTER FORMATION IN IONIZED CLUSTER BEAM DEPOSITION
    MEI, SN
    YANG, SN
    WONG, J
    CHOI, CH
    LU, TM
    JOURNAL OF CRYSTAL GROWTH, 1988, 87 (2-3) : 357 - 364