Preparation of Pb(Zr, Ti)O3 thin films using all dipivaloylmethane source materials by metalorganic chemical vapor deposition

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[1] Yamazaki, Hiroshi
[2] Tsuyama, Tomoko
[3] Kobayashi, Ichizo
[4] Sugimori, Yoshiaki
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Yamazaki, Hiroshi | 1600年 / 31期
关键词：
Ferroelectric materials;
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