共 50 条
- [31] Preparation of Pb(Zrx,Ti1-x)O3 thin films by source gas pulse-introduced metalorganic chemical vapor deposition JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2001, 40 (6A): : 4126 - 4130
- [32] RuO2 bottom electrodes for ferroelectric (Pb, La)(Zr, Ti)O3 thin films by metalorganic chemical vapor deposition Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap, 8 A (4104-4107):
- [33] Crystalline and ferroelectric properties of Pb(Zr, Ti)O3 thin films grown by low-temperature metalorganic chemical vapor deposition JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2002, 41 (11B): : 6686 - 6689
- [34] Fabrication of ferroelectric Pb(Zr,Ti)O3 thin films by liquid delivery metalorganic chemical vapor deposition using a novel titanium source Ti(OEt)2(DPM)2 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (3A): : 1752 - 1756
- [35] Step coverage characteristics of Pb(Zr, Ti)O-3 thin films on various electrode materials by metalorganic chemical vapor deposition JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (9B): : 5808 - 5811
- [37] Preparation and structural analysis of micro-patterned Pb(Zr,Ti)O3 film by metalorganic chemical vapor deposition JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (6A): : 5102 - 5106
- [38] THIN-FILM GROWTH OF PB(ZR, TI)O3 BY PHOTOENHANCED METALORGANIC CHEMICAL-VAPOR-DEPOSITION USING NO2 JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (9B): : 4074 - 4077
- [39] Step coverage characteristics of Pb(Zr, Ti)O3 thin films on various electrode materials by metallorganic chemical vapor deposition Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1997, 36 (9 B): : 5808 - 5811