Asymmetric distribution of oxygen precipitates in Czochralski silicon wafers covered on the backside with polycrystalline silicon films

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[1] Yamanaka, Hideki

[2] Aoki, Yoshihira

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Yamanaka, Hideki | 1600年 / 30期

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[21] Umbrella-like precipitates in nitrogen-doped Czochralski silicon wafers
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[30] ANOMALOUS RING-SHAPED DISTRIBUTION OF OXYGEN PRECIPITATES IN A CZOCHRALSKI-GROWN SILICON CRYSTAL
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