Fabrication of high-aspect-ratio InP-based vertical-cavity laser mirrors using CH4/H2/O2/Ar reactive ion etching

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Schramm, Jeff E.
Babic, Dubravko I.
Hu, Evelyn L.
Bowers, John E.
Merz, James L.
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Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 1997年 / 15卷 / 06期
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