Etching of copper films for thin film transistor liquid crystal display using inductively coupled chlorine-based plasmas

被引：0
|
作者：
机构：
[1] [1,Jang, Kyung Hwan
[2] Lee, Won Jeong
[3] Kim, Hyung Rae
[4] Yeom, Geun Young
来源：
Jang, K.H. | 1600年 / Japan Society of Applied Physics卷 / 43期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [21] Dry Etching of TaN Thin Films by Using an Inductively Coupled Plasma
    Um, Doo-Seung
    Kim, Dong-Pyo
    Woo, Jong-Chang
    Kim, Chang-Il
    FERROELECTRICS, 2009, 384 : 17 - 24
  • [22] Inductively coupled plasma etching of BZN thin films in SF6/Ar plasmas
    Wang, Gang
    Li, Ping
    Zhang, Guojun
    Li, Wei
    Dai, Liping
    Jiang, Jing
    FIFTH INTERNATIONAL CONFERENCE ON MACHINE VISION (ICMV 2012): COMPUTER VISION, IMAGE ANALYSIS AND PROCESSING, 2013, 8783
  • [23] Measurement Technology of Dry Etching Chlorinated Byproducts and Improvement Strategy in Thin Film Transistor Liquid Crystal Display Production
    Shie, Ruei-Hao
    Chan, Chang-chuan
    EPIDEMIOLOGY, 2011, 22 (01) : S192 - S192
  • [24] ANOMALOUS ETCHING RESIDUES OF SPUTTER-DEPOSITED TA UPON REACTIVE ION ETCHING USING CHLORINE-BASED PLASMAS
    NAKAISHI, M
    YAMADA, M
    KONDO, K
    YAMABE, M
    SUGISHIMA, K
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1992, 31 (11B): : L1625 - L1627
  • [25] Anomalous etching residues of sputter-deposited Ta upon reactive ion etching using chlorine-based plasmas
    Nakaishi, Masafumi
    Yamada, Masao
    Kondo, Kazuaki
    Yamabe, Masaki
    Sugishima, Kenji
    Japanese Journal of Applied Physics, Part 2: Letters, 1992, 31 (11 B):
  • [26] Morphological development and etching of gold thin film under UV-exposure in chlorine-based liquids
    An, IS
    Seong, D
    CHEMISTRY LETTERS, 2004, 33 (10) : 1232 - 1233
  • [27] Multiscale detection of defect in thin film transistor liquid crystal display panel
    Song, YC
    Choi, DH
    Park, KH
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (8A): : 5465 - 5468
  • [28] Capacity planning in thin film transistor - Liquid crystal display cell process
    Chen, James C.
    Chen, Tzu-Li
    Pratama, Bayu Rezki
    Tu, Qian-Fang
    JOURNAL OF MANUFACTURING SYSTEMS, 2016, 39 : 63 - 78
  • [29] THIN-FILM-TRANSISTOR LIQUID-CRYSTAL DISPLAY TECHNOLOGY - AN INTRODUCTION
    HOWARD, WE
    IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1992, 36 (01) : 3 - 10
  • [30] THIN-FILM-TRANSISTOR-CONTROLLED LIQUID-CRYSTAL NUMERIC DISPLAY
    ERSKINE, JC
    SNOPKO, PA
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (05) : 802 - 806
12345