WARPAGE OF CZOCHRALSKI-GROWN SILICON WAFERS AS AFFECTED BY OXYGEN PRECIPITATION.

被引：0

作者：

Shimizu, Hirofumi ^{[1
]}

Watanabe, Tetsuo ^{[1
]}

Kakui, Yoshiharu ^{[1
]}

机构：

[1] Hitachi Ltd, Kofu Branch, Yamanashi,, Jpn, Hitachi Ltd, Kofu Branch, Yamanashi, Jpn

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes | 1985年 / 24卷 / 07期

关键词：

Compendex;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：815 / 821

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