Developing an ultraclean pumping system for low-pressure, high-gas-flow applications

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Tohoku Univ, Sendai, Japan [1 ]
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MICRO | / 2卷 / 53-61期
关键词：
Gas pumping system - High pumping speed turbomolecular pump - Quadropole mass spectrometer - Ultraclean pumping system - Vacuum pumping system;
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