Low-pressure gas flow properties of sintered stainless steel microporous media

被引:1
|
作者
Johansson, M. V. [1 ]
Wuest, M. [2 ]
Perrier, P. [1 ]
Graur, I. [1 ]
机构
[1] Aix Marseille Univ, CNRS, IUSTI UMR 7343, 5 rue E Fermi, F-13453 Marseille, France
[2] INFICON AG, Alte Landstrasse 6, Balzers 9496, Liechtenstein
基金
欧盟地平线“2020”;
关键词
TANGENTIAL MOMENTUM ACCOMMODATION; VELOCITY SLIP COEFFICIENTS; SPINNING ROTOR GAUGE; IN-SITU CALIBRATION; MASS-FLOW; PERMEABILITY; VISCOSITY; ELEMENT; ROCKS;
D O I
10.1063/5.0082227
中图分类号
O3 [力学];
学科分类号
08 ; 0801 ;
摘要
The gas flows through the low permeable porous media are of great interest, especially in vacuum technology for filtering, separation processes, protection, and flow control. They can combine a high mass flow rate and a high level of rarefaction. The transient experimental technique, developed previously for the mass flow rate measurements through the microchannels [Rojas Cardenas et al., Phys. Fluids 23, 031702 (2011)], is generalized to obtain the permeability and conductance directly from the pressure variation measurements. The present experimental methodology, allowing for step by step data verification, leads to higher accuracy than the similar and commonly used method such as "pulse-decay " techniques [W. F. Brace and R. J. Martin, Int. J. Rock Mech. Min. Sci. 5, 415-426 (1968)]. The measured data are fitted according to the exponential function with the pressure relaxation time as a single fitting parameter. The permeability and conductance of the sintered stainless steel microporous medium are measured for different gases. By using the methodology proposed by Johansson et al. [Int. J. Heat Mass Transfer 142, 118412 (2019)], the characteristic pore size of the sample was determined to be equal to 1.5 micrometers. It was found that free molecular flow constant conductance is achieved at a pressure below 30 mbar for helium. This property makes this kind of porous media particularly suitable as a leak element by taking advantage of the constancy of conductance in the free molecular flow regime, for example, for calibration of ionization gauges or mass spectrometers [Yoshida et al., Measurement 45(10), 2452-2455 (2012)]. Published under an exclusive license by AIP Publishing.
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页数:15
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