Developing an ultraclean pumping system for low-pressure, high-gas-flow applications

被引：0
|
作者：
Tohoku Univ, Sendai, Japan [1 ]
机构：
来源：
MICRO | / 2卷 / 53-61期
关键词：
Gas pumping system - High pumping speed turbomolecular pump - Quadropole mass spectrometer - Ultraclean pumping system - Vacuum pumping system;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [11] W delta doping in Si(100) using ultraclean low-pressure CVD
    Kanaya, T
    Sakuraba, M
    Murota, J
    APPLIED SURFACE SCIENCE, 2003, 212 : 684 - 688
  • [12] Optoelectronic system for gain measurements in low-pressure gas lasers
    Galaev, II
    Tretyakov, NE
    Fedorov, IA
    Shulpyakov, IO
    INSTRUMENTS AND EXPERIMENTAL TECHNIQUES, 1997, 40 (01) : 108 - 109
  • [13] High- and low-pressure operation of the gas electron multiplier
    Bondar, A
    Buzulutskov, A
    Sauli, F
    Shekhtman, L
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 1998, 419 (2-3): : 418 - 422
  • [14] The potential of high- and low-pressure exhaust gas recirculation
    Hribernik, A
    TURBOCHARGERS AND TURBOCHARGING, 2002, 2002 (01): : 375 - 384
  • [15] LOW-PRESSURE CASTING SYSTEM AND APPLICATIONS AT REGIE-RENAULT
    LEFEBVRE, JH
    DIE CASTING ENGINEER, 1978, 22 (01): : 22 - &
  • [16] Modeling methods for gas quenching, low-pressure carburizing and low-pressure nitriding
    Wolowiec-Korecka, Emilia
    ENGINEERING STRUCTURES, 2018, 177 : 489 - 505
  • [17] Low-pressure glow discharge modeling in transverse supersonic gas flow
    Israphilov, D. I.
    SCIENTIFIC TECHNICAL CONFERENCE ON LOW TEMPERATURE PLASMA DURING THE DEPOSITION OF FUNCTIONAL COATINGS (LTP COATINGS 2017), 2018, 1058
  • [18] Characteristics of surface glow discharge in a low-pressure supersonic gas flow
    I. V. Schweigert
    Journal of Experimental and Theoretical Physics, 2010, 110 : 498 - 503
  • [19] Establishment and Verification of a Primary Low-Pressure Gas Flow Standard at NIMT
    Su, Chun-Min
    Lin, Win-Ti
    Masri, Sutham
    MAPAN-JOURNAL OF METROLOGY SOCIETY OF INDIA, 2011, 26 (03): : 173 - 186
  • [20] Characteristics of surface glow discharge in a low-pressure supersonic gas flow
    Schweigert, I. V.
    JOURNAL OF EXPERIMENTAL AND THEORETICAL PHYSICS, 2010, 110 (03) : 498 - 503
12345