GROWTH OF GaAs ON PREFERENTIALLY ETCHED GaAs SURFACES BY MIGRATION-ENHANCED EPITAXY.

被引:0
|
作者
Kawashima, Minoru [1 ]
Horikoshi, Yoshiji [1 ]
机构
[1] NTT, Musashino, Jpn, NTT, Musashino, Jpn
关键词
ADATOM MIGRATION - MIGRATION-ENHANCED EPITAXY - PREFERENTIAL GROWTH;
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:483 / 486
相关论文
共 50 条
  • [21] Misorientation in GaAs on Si grown by migration-enhanced epitaxy
    Nozawa, Kazuhiko
    Horikoshi, Yoshiji
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 1993, 32 (1 B): : 626 - 631
  • [22] MIGRATION-ENHANCED EPITAXY OF DOPED GAAS ON (111)B AND (100)GAAS SUBSTRATES
    FU, JM
    ZHANG, K
    MILLER, DL
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1992, 10 (02): : 779 - 782
  • [23] GROWTH OF GAAS ON HYDROGEN-FLUORIDE TREATED SI (100) SURFACES USING MIGRATION-ENHANCED EPITAXY
    RAO, TS
    NOZAWA, K
    HORIKOSHI, Y
    APPLIED PHYSICS LETTERS, 1992, 60 (13) : 1606 - 1608
  • [24] REALIZATION OF LOW FACET DENSITY AND THE GROWTH-MECHANISM OF GAAS ON GAAS(110) BY MIGRATION-ENHANCED EPITAXY
    LOPEZ, M
    TAKANO, Y
    PAK, K
    YONEZU, H
    APPLIED PHYSICS LETTERS, 1991, 58 (06) : 580 - 582
  • [25] GROWTH-MECHANISM OF GAAS DURING MIGRATION-ENHANCED EPITAXY AT LOW GROWTH TEMPERATURES
    HORIKOSHI, Y
    KAWASHIMA, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1989, 28 (02): : 200 - 209
  • [26] OPTICAL INVESTIGATION ON THE GROWTH-PROCESS OF GAAS DURING MIGRATION-ENHANCED EPITAXY
    KOBAYASHI, N
    HORIKOSHI, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (11): : L1880 - L1882
  • [27] SCANNING TUNNELING MICROSCOPE STUDY OF GAAS(001) SURFACES GROWN BY MIGRATION-ENHANCED EPITAXY
    KIM, J
    GALLAGHER, MC
    WILLIS, RF
    FU, JM
    MILLER, DL
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (04): : 1370 - 1373
  • [28] MIGRATION-ENHANCED EPITAXY ON A (111)B ORIENTED GAAS SUBSTRATE
    IMAMOTO, H
    SATO, F
    IMANAKA, K
    SHIMURA, M
    APPLIED PHYSICS LETTERS, 1989, 55 (02) : 115 - 116
  • [29] MISORIENTATION IN GAAS ON SI GROWN BY MIGRATION-ENHANCED EPITAXY - COMMENTS
    RIESZ, F
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1993, 32 (10): : 4754 - 4755
  • [30] ANOMALOUS DISTRIBUTION OF IN ATOMS IN GAAS DURING MIGRATION-ENHANCED EPITAXY
    YAMAGUCHI, H
    HORIKOSHI, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1989, 28 (11): : L2010 - L2012