Excimer laser reactive ablation deposition of silicon nitride films

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[1] D'Anna, E.
[2] Leggieri, G.
[3] Luches, A.
[4] Martino, M.
[5] Perrone, A.
[6] Majni, G.
[7] Mengucci, P.
[8] Alexandrescu, R.
[9] Mihailescu, I.N.
[10] Zemek, J.
来源：
D'Anna, E. | 1600年 / Elsevier Science B.V., Amsterdam, Netherlands卷 / 86期
关键词：
Laser reactive ablation - Profilometry;
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