Excimer laser reactive ablation deposition of silicon nitride films

被引：0
|
作者：
机构：
[1] D'Anna, E.
[2] Leggieri, G.
[3] Luches, A.
[4] Martino, M.
[5] Perrone, A.
[6] Majni, G.
[7] Mengucci, P.
[8] Alexandrescu, R.
[9] Mihailescu, I.N.
[10] Zemek, J.
来源：
D'Anna, E. | 1600年 / Elsevier Science B.V., Amsterdam, Netherlands卷 / 86期
关键词：
Laser reactive ablation - Profilometry;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [21] Deposition of amorphous alloy films by excimer laser ablation
    Yano, T
    Ooie, T
    Yoneda, M
    Katsumura, M
    ICALEO'96 - PROCEEDINGS OF THE LASER MATERIALS PROCESSING CONFERENCE, 1996, 81 : A67 - A74
  • [22] DEPOSITION OF HIGH-QUALITY TIN FILMS BY EXCIMER-LASER ABLATION IN REACTIVE GAS
    MIHAILESCU, IN
    CHITICA, N
    NISTOR, LC
    POPESCU, M
    TEODORESCU, VS
    URSU, I
    ANDREI, A
    BARBORICA, A
    LUCHES, A
    DEGIORGI, ML
    PERRONE, A
    DUBREUIL, B
    HERMANN, J
    JOURNAL OF APPLIED PHYSICS, 1993, 74 (09) : 5781 - 5789
  • [23] Deposition of carbon nitride films by reactive sub-picosecond pulsed laser ablation
    Acquaviva, S
    Perrone, A
    Zocco, A
    Klini, A
    Fotakis, C
    THIN SOLID FILMS, 2000, 373 (1-2) : 266 - 272
  • [24] Deposition of carbon nitride films by reactive pulsed-laser ablation at high fluences
    Zocco, A
    Perrone, A
    D'Anna, E
    Leggieri, G
    Luches, A
    Klini, A
    Zergioti, I
    Fotakis, C
    DIAMOND AND RELATED MATERIALS, 1999, 8 (2-5) : 582 - 585
  • [25] LASER REACTIVE ABLATION DEPOSITION OF TIC FILMS
    LEGGIERI, G
    LUCHES, A
    PERRONE, A
    MAJNI, G
    MENGUCCI, P
    VACUUM, 1995, 46 (8-10) : 991 - 995
  • [26] Excimer laser assisted deposition of metal films on aluminum nitride
    Lumpp, JK
    Li, H
    AlBanna, S
    IEEE/LEOS 1996 SUMMER TOPICAL MEETINGS - ADVANCED APPLICATIONS OF LASERS IN MATERIALS AND PROCESSING, DIGEST, 1996, : 61 - 62
  • [27] LASER ABLATION DEPOSITION OF TITANIUM NITRIDE FILMS ON SILICON SUBSTRATES AT ROOM-TEMPERATURE
    AUCIELLO, O
    BARNES, T
    CHEVACHAROENKUL, S
    SCHREINER, AF
    MCGUIRE, GE
    THIN SOLID FILMS, 1989, 181 : 65 - 73
  • [28] Deposition of silicon nitride films by pulsed laser ablation of the Si target in nitrogen gas
    Umezu, I
    Kohno, K
    Yamaguchi, T
    Sugimura, A
    Inada, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2002, 20 (01): : 30 - 32
  • [29] Thin carbon nitride films deposited by laser ablation with an XeCl excimer laser
    Luches, A
    D'Anna, E
    Leggieri, G
    Martino, M
    Perrone, A
    Majni, G
    Mengucci, P
    Gyorgy, E
    Mihailescu, IN
    Popescu, M
    ALT '97 INTERNATIONAL CONFERENCE ON LASER SURFACE PROCESSING, 1998, 3404 : 91 - 98
  • [30] Carbon nitride films deposited by reactive laser ablation
    De Giorgi, ML
    Leggieri, G
    Luches, A
    Martino, M
    Perrone, A
    Zocco, A
    Barucca, G
    Majni, G
    Gyorgy, E
    Mihailescu, IN
    Popescu, M
    APPLIED SURFACE SCIENCE, 1998, 127 : 481 - 485
12345