ANALYTICAL INVESTIGATION OF PLASMA AND ELECTRODE POTENTIALS IN A DIODE TYPE RF DISCHARGE.

被引：0

作者：

Suzuki, Keizo ^{[1
]}

Ninomiya, Ken ^{[1
]}

Nishimatsu, Shigeru ^{[1
]}

Thoman Jr., J.W. ^{[1
]}

Steinfeld, J.I. ^{[1
]}

机构：

[1] Hitachi Ltd, Kokubunji, Jpn, Hitachi Ltd, Kokubunji, Jpn

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes | 1986年 / 25卷 / 10期

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摘要：

引用

页码：1569 / 1574

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