Investigation of Helicon discharge plasma parameters in the hybrid RF plasma system

被引：0

作者：

Aleksandrov, A.F. ^{[1
]}

Petrov, A.K. ^{[1
]}

Vavilin, K.V. ^{[1
]}

Kralkina, E.A. ^{[1
]}

Neklyudova, P.A. ^{[1
]}

Nikonov, A.M. ^{[1
]}

Pavlov, V.B. ^{[1
]}

Ayrapetov, A.A. ^{[2
]}

Odinokov, V.V. ^{[2
]}

Sologub, V.A. ^{[2
]}

Pavlov, G.Ya. ^{[2
]}

机构：

[1] Physical Department of Lomonosov, Moscow State University, Build. 2, 1 Leninskie Gory, Moscow,111991, Russia

[2] Research Institute of Precision Machinery Industry, 10 Panfilovsky av., Zelenograd, Moscow,124460, Russia

来源：

Applied Physics | 2015年 / 2015-January卷 / 03期

关键词：

Discharge plasma - External magnetic field - Growth stimulation - Helicon discharge - Inductive - Ion probe - Radio frequencies - RF plasma systems;

D O I：

暂无

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学科分类号：

摘要：

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页码：25 / 28

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[1] Investigation of the helicon discharge plasma parameters in a hybrid RF plasma system
A. F. Aleksandrov
A. K. Petrov
K. V. Vavilin
E. A. Kralkina
P. A. Neklyudova
A. M. Nikonov
V. B. Pavlov
A. A. Ayrapetov
V. V. Odinokov
V. A. Sologub
G. Ya. Pavlov
Plasma Physics Reports, 2016, 42 : 290 - 292
[2] Investigation of the helicon discharge plasma parameters in a hybrid RF plasma system
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Nikonov, A. M.
Pavlov, V. B.
Ayrapetov, A. A.
Odinokov, V. V.
Sologub, V. A.
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[3] Erratum to: Investigation of the Helicon Discharge Plasma Parametersin a Hybrid RF Plasma System
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