Investigation of Helicon discharge plasma parameters in the hybrid RF plasma system

被引：0

作者：

Aleksandrov, A.F. ^{[1
]}

Petrov, A.K. ^{[1
]}

Vavilin, K.V. ^{[1
]}

Kralkina, E.A. ^{[1
]}

Neklyudova, P.A. ^{[1
]}

Nikonov, A.M. ^{[1
]}

Pavlov, V.B. ^{[1
]}

Ayrapetov, A.A. ^{[2
]}

Odinokov, V.V. ^{[2
]}

Sologub, V.A. ^{[2
]}

Pavlov, G.Ya. ^{[2
]}

机构：

[1] Physical Department of Lomonosov, Moscow State University, Build. 2, 1 Leninskie Gory, Moscow,111991, Russia

[2] Research Institute of Precision Machinery Industry, 10 Panfilovsky av., Zelenograd, Moscow,124460, Russia

来源：

Applied Physics | 2015年 / 2015-January卷 / 03期

关键词：

Discharge plasma - External magnetic field - Growth stimulation - Helicon discharge - Inductive - Ion probe - Radio frequencies - RF plasma systems;

D O I：

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学科分类号：

摘要：

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页码：25 / 28

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