ANALYTICAL INVESTIGATION OF PLASMA AND ELECTRODE-POTENTIALS IN A DIODE TYPE RF DISCHARGE

被引：7

作者：

SUZUKI, K ^{[1
]}

NINOMIYA, K ^{[1
]}

NISHIMATSU, S ^{[1
]}

THOMAN, JW ^{[1
]}

STEINFELD, JI ^{[1
]}

机构：

[1] MIT,DEPT CHEM,CAMBRIDGE,MA 02139

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1986年 / 25卷 / 10期

关键词：

D O I：

10.1143/JJAP.25.1569

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：1569 / 1574

页数：6

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