ANALYTICAL INVESTIGATION OF PLASMA AND ELECTRODE POTENTIALS IN A DIODE TYPE RF DISCHARGE.

被引：0
|
作者：
Suzuki, Keizo [1 ]
Ninomiya, Ken [1 ]
Nishimatsu, Shigeru [1 ]
Thoman Jr., J.W. [1 ]
Steinfeld, J.I. [1 ]
机构：
[1] Hitachi Ltd, Kokubunji, Jpn, Hitachi Ltd, Kokubunji, Jpn
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes | 1986年 / 25卷 / 10期
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页码：1569 / 1574
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