PROPERTIES OF HYDROGENATED AND FLUORINATED AMORPHOUS SILICON-CARBON ALLOY FILMS PREPARED BY MAGNETRON SPUTTERING.

被引：0
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作者：
Saito, N. [1 ]
机构：
[1] Shizuoka Univ, Hamamatsu, Jpn, Shizuoka Univ, Hamamatsu, Jpn
来源：
Philosophical Magazine B: Physics of Condensed Matter; Electronic, Optical and Magnetic Properties | 1987年 / 55卷 / 05期
关键词：
This work is partly supported by (1985) Grant-in-Aid for Encouragement of Young Scientists (A) (No. 60750007) from the Ministry of Education; Science and Culture of Japan;
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摘要：
20
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页码：615 / 625
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