ANNEALING BEHAVIOR OF HYDROGENATED AMORPHOUS SILICON-NITROGEN ALLOY-FILMS PREPARED BY SPUTTERING

被引：18

|

作者：

MORIMOTO, A

OOZORA, S

KUMEDA, M

SHIMIZU, T

机构：

来源：

PHYSICA STATUS SOLIDI B-BASIC RESEARCH | 1983年 / 119卷 / 02期

关键词：

D O I：

10.1002/pssb.2221190233

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

引用

收藏

页码：715 / 720

页数：6

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