ANNEALING BEHAVIOR OF HYDROGENATED AMORPHOUS SILICON-NITROGEN ALLOY-FILMS PREPARED BY SPUTTERING

被引：18
|
作者：
MORIMOTO, A
OOZORA, S
KUMEDA, M
SHIMIZU, T
机构：
来源：
PHYSICA STATUS SOLIDI B-BASIC RESEARCH | 1983年 / 119卷 / 02期
关键词：
D O I：
10.1002/pssb.2221190233
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
引用
收藏
页码：715 / 720
页数：6
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