PROPERTIES OF HYDROGENATED AND FLUORINATED AMORPHOUS SILICON-CARBON ALLOY FILMS PREPARED BY MAGNETRON SPUTTERING.

被引：0
|
作者：
Saito, N. [1 ]
机构：
[1] Shizuoka Univ, Hamamatsu, Jpn, Shizuoka Univ, Hamamatsu, Jpn
来源：
Philosophical Magazine B: Physics of Condensed Matter; Electronic, Optical and Magnetic Properties | 1987年 / 55卷 / 05期
关键词：
This work is partly supported by (1985) Grant-in-Aid for Encouragement of Young Scientists (A) (No. 60750007) from the Ministry of Education; Science and Culture of Japan;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
20
引用
收藏
页码：615 / 625
相关论文
共 50 条
  • [31] Transport properties of amorphous hydrogenated silicon-carbon alloys
    Schmidt, JA
    Hundhausen, M
    Ley, L
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 2000, 266 : 694 - 698
  • [32] ELECTRO-LUMINESCENCE IN HYDROGENATED AMORPHOUS SILICON-CARBON ALLOY
    MUNEKATA, H
    KUKIMOTO, H
    APPLIED PHYSICS LETTERS, 1983, 42 (05) : 432 - 434
  • [33] OPTICAL-CONSTANTS AND MICROSTRUCTURE OF AMORPHOUS HYDROGENATED SILICON-CARBON ALLOY-FILMS
    MUI, K
    BASA, DK
    CORDERMAN, R
    SMITH, FW
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1987, 97-8 : 999 - 1002
  • [34] Preparation of fluorinated amorphous carbon nitride films by magnetron sputtering
    Yokomichi, H
    SURFACE ENGINEERING, 2000, 16 (03) : 229 - 233
  • [35] DEPENDENCE OF PROPERTIES OF HYDROGENATED MICROCRYSTALLINE AND AMORPHOUS-SILICON FILMS PREPARED BY PLANAR MAGNETRON SPUTTERING IN INERT-GAS
    SAITO, N
    SANNOMIYA, H
    YAMAGUCHI, T
    TANAKA, N
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1984, 35 (04): : 241 - 247
  • [36] Conductivity dependence on the thickness of hydrogenated, amorphous silicon-carbon films
    Koropecki, RR
    Arce, RD
    Buitrago, RH
    Bittencourt, C
    Alvarez, F
    THIN SOLID FILMS, 1997, 295 (1-2) : 287 - 294
  • [37] THERMALLY INDUCED METASTABLE DEFECTS IN HYDROGENATED AMORPHOUS-SILICON AND SILICON-CARBON ALLOY-FILMS
    XU, XX
    OKUMURA, A
    MORIMOTO, A
    KUMEDA, M
    SHIMIZU, T
    PHYSICAL REVIEW B, 1988, 38 (12): : 8371 - 8376
  • [38] AMORPHOUS SILICON-CARBON FILMS PREPARED BY REACTIVE EVAPORATION
    GIORGIANNI, U
    GRASSO, V
    NARDI, N
    NERI, F
    TRUSSO, S
    NUOVO CIMENTO DELLA SOCIETA ITALIANA DI FISICA D-CONDENSED MATTER ATOMIC MOLECULAR AND CHEMICAL PHYSICS FLUIDS PLASMAS BIOPHYSICS, 1993, 15 (06): : 917 - 924
  • [39] STRUCTURE AND MECHANICAL-PROPERTIES OF HYDROGENATED CARBON-FILMS PREPARED BY MAGNETRON SPUTTERING
    MARCHON, B
    VO, PN
    KHAN, MR
    AGER, JW
    IEEE TRANSACTIONS ON MAGNETICS, 1991, 27 (06) : 5160 - 5162
  • [40] Comparison between fluorinated and hydrogenated amorphous silicon carbide prepared by reactive sputtering
    Demichelis, F.
    Pirri, C.F.
    Tresso, E.
    Stapinski, T.
    Boarino, L.
    Rava, P.
    Proceedings of the International Conference on Photovoltaic Solar Energy, 1991,
12345