Ga-As-H-Cl VAPOR PHASE EPITAXIAL GROWTH SYSTEM.

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作者：
Han, H.G. [1 ]
Rao, Y.K. [1 ]
机构：
[1] Univ of Washington, Dep of Materials, Science & Engineering, Seattle,, WA, USA, Univ of Washington, Dep of Materials Science & Engineering, Seattle, WA, USA
来源：
Metallurgical transactions. B, Process metallurgy | 1985年 / 16 B卷 / 01期
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页码：97 / 105
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