NOVEL SUBMICROMETER MOS DEVICES BY SELF-ALIGNED NITRIDATION OF SILICIDE.

被引：0

作者：

Kaneko, Hiroko ^{[1
]}

Koyanagi, Mitsumasa ^{[1
]}

Shimizu, Shinji ^{[1
]}

Kubota, Yukiko ^{[1
]}

Kishino, Seigo ^{[1
]}

机构：

[1] Hitachi Ltd, Ome, Jpn, Hitachi Ltd, Ome, Jpn

来源：

IEEE Transactions on Electron Devices | 1986年 / ED-33卷 / 11期

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摘要：

引用

页码：1702 / 1709

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