Short-pulse ultraviolet laser ablation of ceramic

被引：0
|
作者：
Fang, Xiaodong [1 ]
Li, Guangyin [1 ]
Yu, Yinshan [1 ]
机构：
[1] Anhui Inst of Optics and Fine, Mechanics, Academia Sinica, Hefei, China
来源：
Yingyong Jiguang/Applied Laser Technology | 1996年 / 16卷 / 02期
关键词：
Ceramic materials - Excimer lasers;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
KrF excimer laser (248nm) was adopted to the ablation of SrTiO3 and Al2O3 ceramics. The relationship between ablation rate and laser fluence was presented and the experimental results were analyzed.
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页码：77 / 78
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