Short-pulse ultraviolet laser ablation of ceramic

被引:0
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作者
Fang, Xiaodong [1 ]
Li, Guangyin [1 ]
Yu, Yinshan [1 ]
机构
[1] Anhui Inst of Optics and Fine, Mechanics, Academia Sinica, Hefei, China
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Ceramic materials - Excimer lasers;
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摘要
KrF excimer laser (248nm) was adopted to the ablation of SrTiO3 and Al2O3 ceramics. The relationship between ablation rate and laser fluence was presented and the experimental results were analyzed.
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页码:77 / 78
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