QUANTUM WELL INJECTION LASERS GROWN BY MOLECULAR BEAM EPITAXY.

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作者：
Woodbridge, K.
Blood, P.
Fletcher, E.D.
Hulyer, P.J.
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来源：
Annual Review - Philips Research Laboratories | 1983年
关键词：
MOLECULAR BEAMS - Applications;
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摘要：
MBE is a refined form of vacuum evaporation in which molecular beams of the constituent elements produced from effusion cells impinge upon a heated substrate to produce the required epitaxial layer. The UHV system used in this work is fitted with a sample interlock for substrate transfer and extensive cryopanelling to reduce background gas species. The system has been fully automated with computer control of cell temperatures and shutter operations enabling pre-programming of complex multilayer structures.
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页码：50 / 51
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