CURRENT INDUSTRIAL APPLICATIONS OF HIGH RATE SPUTTERING.

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作者：
Smith Jr., Hugh R.
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Metal Finishing | 1978年 / 76卷 / 03期
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The large scale applications of high rate sputtering cover a very broad spectrum of industrial activity. Because of the diverse nature of these applications, various different types of sputtering assemblies have evolved to satisfy the individual process requirements. A brief review is presented of the physical and operating characteristics, including the advantages, disadvantages and limitations of the various types, to help illustrate the rationale for their selection and use. Main emphasis is placed on the magnetically enhanced sputtering techniques.
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页码：60 / 63
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