SURFACE BINDING ENERGY IN SLOW COLLISIONAL SPUTTERING.

被引：0
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作者：
Kelly, Roger [1 ]
机构：
[1] IBM, Yorktown Heights, NY, USA, IBM, Yorktown Heights, NY, USA
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1986年 / B18卷 / 4-6期
关键词：
ATOMIC COLLISIONS - SURFACE BINDING ENERGY - SURFACE VACANCIES;
D O I：
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学科分类号：
摘要：
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页码：388 / 398
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