SYNTHESIS OF MON AND RUN BY ACTIVE NITROGEN SPUTTERING.

被引：0

作者：

Ihara, H. ^{[1
]}

Terada, N. ^{[1
]}

Senzaki, K. ^{[1
]}

Hirabayashi, M. ^{[1
]}

Kimura, Y. ^{[1
]}

Uzuka, R. ^{[1
]}

Kawashima, F. ^{[1
]}

Akimoto, M. ^{[1
]}

Kezuka, H. ^{[1
]}

机构：

[1] Electrotechnical Lab, Niihari-gun, Jpn, Electrotechnical Lab, Niihari-gun, Jpn

来源：

IEEE Transactions on Magnetics | 1986年 / MAG-23卷 / 02期

关键词：

MOLYBDENUM COMPOUNDS - Synthesis - RUBIDIUM COMPOUNDS - Synthesis;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

MoN films with B1 and hexagonal phases were prepared by active nitrogen sputtering. Films with high-superconducting transition temperatures (T//c 14 K) were synthesized using NO sputtering gas, which favors the production of active nitrogen atoms. The T//c of B1 and hexagonal mixed-phase films was higher than that of either of the single phase films. RuN//x films consisting of B1-like RuN and hexagonal Ru had T//c of 9. 1 K. High-pressure-annealed films attained the highest T//c 16. 4 K, of all the films in the MoN system for both B1 and hexagonal mixed-phase. The highest T//c for the Ru-N films (high-pressure-annealed) was 10. 1 K.

引用

共 50 条

[1] SYNTHESIS OF MON AND RUN BY ACTIVE NITROGEN SPUTTERING
IHARA, H
TERADA, N
SENZAKI, K
HIRABAYASHI, M
KIMURA, Y
UZUKA, R
KAWASHIMA, F
AKIMOTO, M
KEZUKA, H
IEEE TRANSACTIONS ON MAGNETICS, 1987, 23 (02) : 1011 - 1013
[2] SPUTTERING.
Carlisle, James W.
Product Finishing (London), 1982, 35 (11): : 32 - 34
[3] NEUTRON SPUTTERING.
Behrisch, Rainer
Nuclear Instruments and Methods, 1975, 132 : 293 - 300
[4] PREFERENTIAL SPUTTERING.
Shimizu, Ryuichi
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1986, B18 (4-6) : 486 - 495
[5] LASER SPUTTERING.
Kelly, Roger
Cuomo, J.J.
Leary, P.A.
Rothenberg, Joshua E.
Braren, B.E.
Aliotta, C.F.
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, 1985, 9 (03) : 329 - 340
[6] RECENT DEVELOPMENTS IN SPUTTERING - MAGNETRON SPUTTERING.
Thornton, John A.
Metal Finishing, 1979, 77 (05) : 83 - 87
[7] PRACTICAL ASPECTS OF SPUTTERING.
Aronson, Arnold
Water Resources and Environmental Engineering Research Report (State University of New York at Buffalo, Department of Civil Engineering), 1979,
[8] About anomalies in sputtering.
Muenster, Cl.
ZEITSCHRIFT FUR PHYSIK, 1932, 75 (11-12): : 716 - 722
[9] Note on cathodic sputtering.
Kaye, GWC
PROCEEDINGS OF THE PHYSICAL SOCIETY OF LONDON, 1913, 25 : 198 - 202
[10] DECORATION OF PLASTICS BY VACUUM SPUTTERING.
Dickinson, T.E.
Product Finishing (London), 1980, 33 (05): : 8 - 10

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