RECENT DEVELOPMENTS IN SPUTTERING - MAGNETRON SPUTTERING.

被引：0
|
作者：
Thornton, John A.
机构：
来源：
Metal Finishing | 1979年 / 77卷 / 05期
关键词：
ELECTRON TUBES; MAGNETRON - Applications - PLASTICS - Protective Coatings;
D O I：
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中图分类号：
学科分类号：
摘要：
This concluding part of an article on sputtering deals with substrate heating in magnetron sputtering and explains how this kind of sputtering provides coatings with much better adhesion than is achieved with evaporation. Magnetron sputtering also permits increased deposition rates, sufficiently low substrate heating rates to coat plastics, and deposition over large areas.
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页码：83 / 87
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