B-doped Si(001)2 × 1 gas-source molecular-beam epitaxy from Si2H6 and B2H6

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Univ of Illinois, Urbana, United States [1 ]
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Vacuum | / 8-10卷 / 913-916期
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Number:; DEAC0276ER01198; Acronym:; -; Sponsor:; N00014-Sl-K-0568; ONR; Sponsor: Office of Naval Research; SRC; Sponsor: Semiconductor Research Corporation;
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