Nitrogen implantation in 4H and 6H-SiC

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LETI-CEA, Département de Micro-technologies, CEA-Grenoble, 17 rue des Martyrs, F-38054 Grenoble Cedex 9, France [1 ]
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Mater Sci Eng B Solid State Adv Technol | / 368-372期
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