Quick deposition of various thin films by intense pulsed ion beam

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作者：
Masugata, K.
Sonegawa, T.
Ohashi, M.
Hoshino, H.
Shimotori, Y.
Furuuchi, S.
Yamamoto, H.
Ono, T.
Mito, M.
Sato, H.
Hatsushika, T.
Suzuki, T.
Takaai, T.
Yatsui, K.
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Proceedings of the International Conference on High-Power Particle Beams | 1990年
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