Fe and Ti implants in In0.52Al0.48As

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[1] Martin, Jaime M.
[2] Nadella, Ravi K.
[3] Rao, Mulpuri V.
[4] Simons, David S.
[5] Chi, Peter H.
[6] Caneau, C.
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Martin, Jaime M. | 1600年 / 22期
关键词：
Implantation temperature - Iron implants - Rapid thermal annealing - Room temperature - Rutherford backscattering - Secondary ion mass spectrometry - Titanium implants;
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