Structural analysis of nanocrystalline SiC thin films grown on silicon by ECR plasma CVD

被引：0
|
作者：
Toal, S.J. [1 ]
Reehal, H.S. [1 ]
Webb, S.J. [1 ]
Barradas, N.P. [2 ]
Jeynes, C. [2 ]
机构：
[1] South Bank University, School of Electrical, Electronic and Information Engineering, 103 Borough Rd., London SE1 0AA, United Kingdom
[2] University of Surrey, School of Electronic Engineering, Information Technology and Mathematics, Guildford, GU2 5XH, United Kingdom
来源：
Thin Solid Films | 1999年 / 343卷
关键词：
Number:; -; Acronym:; Sponsor: University of Surrey; NMRC; Sponsor: National Medical Research Council; EC; Sponsor: European Commission;
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页码：292 / 294
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