Large-scale fabrication of hard superlattice thin films by combined steered arc evaporation and unbalanced magnetron sputtering

被引：0
|
作者：
Donohue, L.A. [1 ]
Munz, W.-D. [1 ]
Lewis, D.B. [1 ]
Cawley, J. [1 ]
Hurkmans, T. [1 ]
Trinh, T. [1 ]
Petrov, I. [1 ]
Greene, J.E. [1 ]
机构：
[1] Materials Rsch Inst, Sheffield Hallam Univ, Pond St, City Campus, Sheffield S1 1WB, United Kingdom
来源：
Surface and Coatings Technology | 1997年 / 93卷 / 01期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
下载
收藏
页码：69 / 87
相关论文
共 34 条
  • [1] Large-scale fabrication of hard superlattice thin films by combined steered arc evaporation and unbalanced magnetron sputtering
    Donohue, LA
    Munz, WD
    Lewis, DB
    Cawley, J
    Hurkmans, T
    Trinh, T
    Petrov, I
    Greene, JE
    SURFACE & COATINGS TECHNOLOGY, 1997, 93 (01): : 69 - 87
  • [2] Investigation of superlattice coatings deposited by a combined steered arc evaporation and unbalanced magnetron sputtering technique
    Donohue, LA
    Cawley, J
    Lewis, DB
    Brooks, JS
    Munz, WD
    SURFACE & COATINGS TECHNOLOGY, 1995, 76 (1-3): : 149 - 158
  • [3] DEPOSITION AND CHARACTERIZATION OF TIALZRN FILMS PRODUCED BY A COMBINED STEERED ARC AND UNBALANCED MAGNETRON SPUTTERING TECHNIQUE
    DONOHUE, LA
    CAWLEY, J
    BROOKS, JS
    MUNZ, WD
    SURFACE & COATINGS TECHNOLOGY, 1995, 74-5 (1-3): : 123 - 134
  • [4] Large-Scale Manufacturing of Nanoscale Multilayered Hard Coatings Deposited by Cathodic Arc/Unbalanced Magnetron Sputtering
    W. D. Münz
    MRS Bulletin, 2003, 28 : 173 - 179
  • [5] Large-scale manufacturing of nanoscale multilayered hard coatings deposited by cathodic arc/unbalanced magnetron sputtering
    Münz, WD
    MRS BULLETIN, 2003, 28 (03) : 173 - 179
  • [6] Hard coatings deposited by combined cathodic arc evaporation and magnetron sputtering (Arc Bond Sputtering: ABS)
    Münz, W.D.
    Schönjahn, C.
    Paritong, H.
    Smith, I.J.
    Vide: Science, Technique et Applications, 2000, 3
  • [7] Hard coatings deposited by combined cathodic arc evaporation and magnetron sputtering (arc bond sputtering : ABS)
    Münz, WD
    Schönjahn, C
    Paritong, H
    Smith, IJ
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 2000, 55 (297): : 205 - 223
  • [8] Large-scale Fabrication of Tellurium Nanowire Arrays by Magnetron Sputtering with Controllable Morphology
    Zhang Zhi-Wei
    Deng Yuan
    JOURNAL OF INORGANIC MATERIALS, 2015, 30 (01) : 107 - 112
  • [9] Properties of various large-scale fabricated TiAlN- and CrN-based superlattice coatings grown by combined cathodic arc-unbalanced magnetron sputter deposition
    Münz, WD
    Donohue, LA
    Hovsepian, PE
    SURFACE & COATINGS TECHNOLOGY, 2000, 125 (1-3): : 269 - 277
  • [10] Structure and tribological behaviour of nanoscale multilayer C/Cr coatings deposited by the combined steered cathodic arc/unbalanced magnetron sputtering technique
    Hovsepian, PE
    Kok, YN
    Ehiasarian, AP
    Erdemir, A
    Wen, JG
    Petrov, I
    THIN SOLID FILMS, 2004, 447 : 7 - 13
1234