Hard coatings deposited by combined cathodic arc evaporation and magnetron sputtering (Arc Bond Sputtering: ABS)

被引：0
|
作者：
Münz, W.D. [1 ,2 ]
Schönjahn, C. [1 ]
Paritong, H. [1 ]
Smith, I.J. [2 ]
机构：
[1] Sheffield Hallam University, Materials Research Institute, Howard Street, Sheffield S1 1WB, United Kingdom
[2] Bodycote SHU Coatings Ltd., Matilda Street, Sheffield S1 4QF, United Kingdom
来源：
Vide: Science, Technique et Applications | 2000年 / 3卷
关键词：
Adhesion - Chromium - Etching - Hardness - Ions - Oxidation - Pitting - Protective coatings - Sputter deposition - Superlattices - Wear resistance;
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摘要：
The ABS (Arc Bond Sputter) technique combines steered cathodic arc evaporation and unbalanced magnetron sputtering to deposit hard PVD coatings with enhanced adhesion and smooth coating surfaces (Ra0.43Al0.52Cr0.03Y0.02N as coating material. Additionally, superlattice structured coatings base on TiAlN/ CrN, TiAlN/VN and CrN/NbN have been developed exhibiting hardness values up to Hpl>45 GPa, critical load values Lc>50 N, sliding wear values of -17 m2N-1, friction coefficients as low as 0.4, resistance against oxidation up to 900 >C and pitting potentials of coated-steel substrates in chlorine environments beyond +750 mV, depending on their composition and deposition parameters. The ABS technique utilizes linear dual purpose cathodes (arc and magnetron), high turbomolecular pumping capacity and precise total pressure controlled reactive gas atmospheres, thus achieving identical productivity for binary nitrides and advanced superlattice - architectured multilayer coating systems.
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