Large-scale fabrication of hard superlattice thin films by combined steered arc evaporation and unbalanced magnetron sputtering

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作者：
Donohue, L.A. [1 ]
Munz, W.-D. [1 ]
Lewis, D.B. [1 ]
Cawley, J. [1 ]
Hurkmans, T. [1 ]
Trinh, T. [1 ]
Petrov, I. [1 ]
Greene, J.E. [1 ]
机构：
[1] Materials Rsch Inst, Sheffield Hallam Univ, Pond St, City Campus, Sheffield S1 1WB, United Kingdom
来源：
Surface and Coatings Technology | 1997年 / 93卷 / 01期
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页码：69 / 87
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