Large-scale fabrication of hard superlattice thin films by combined steered arc evaporation and unbalanced magnetron sputtering

被引：0
|
作者：
Donohue, L.A. [1 ]
Munz, W.-D. [1 ]
Lewis, D.B. [1 ]
Cawley, J. [1 ]
Hurkmans, T. [1 ]
Trinh, T. [1 ]
Petrov, I. [1 ]
Greene, J.E. [1 ]
机构：
[1] Materials Rsch Inst, Sheffield Hallam Univ, Pond St, City Campus, Sheffield S1 1WB, United Kingdom
来源：
Surface and Coatings Technology | 1997年 / 93卷 / 01期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
下载
收藏
页码：69 / 87
相关论文
共 34 条
  • [31] An innovative method to achieve large-scale high-quality VO2 thin films: Oxidation of vanadium nitride material deposited by sputtering
    Xiang, Wenqiang
    Le Drogoff, Boris
    Chaker, Mohamed
    APPLIED SURFACE SCIENCE, 2023, 633
  • [32] Optical and structural characterization of ZnO thin films and fabrication of bulk acoustic wave resonator (BAW) for the realization of gas sensors by stacking ZnO thin layers fabricated by e-beam evaporation and rf magnetron sputtering techniques
    Atanas, JP
    Al Asmar, R
    Khoury, A
    Foucaran, A
    SENSORS AND ACTUATORS A-PHYSICAL, 2006, 127 (01) : 49 - 55
  • [33] Volume-Confined Fabrication of Large-Scale Single-Crystalline Molecular Ferroelectric Thin Films and Their Applications in 2D Materials
    Cao, Xiao-Xing
    Zhou, Ru-Jie
    Xiong, Yu-An
    Du, Guo-Wei
    Feng, Zi-Jie
    Pan, Qiang
    Chen, Yin-Zhu
    Ji, Hao-Ran
    Ni, Zhenhua
    Lu, Junpeng
    Hu, Huihui
    You, Yu-Meng
    ADVANCED SCIENCE, 2024, 11 (04)
  • [34] EFFECTS OF ALUMINUM-SILICON COPPER SPUTTERING TARGET PROCESSING METHODS ON THIN-FILM UNIFORMITY AND PROCESS-CONTROL DURING VERY LARGE-SCALE INTEGRATED DEVICE FABRICATION
    DUNLOP, JA
    POULIQUEN, BY
    DRINNON, TJ
    WILCOXEN, DT
    HUNEKE, JC
    IVANOV, IC
    KNORR, DB
    TRACY, DP
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (04): : 1558 - 1565
1234