Electromagnetic basis of the transformer model for an inductively coupled RF plasma source

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作者：
El-Fayoumi, I.M. [1 ]
Jones, I.R. [1 ]
机构：
[1] Flinders Univ, Adelaide
来源：
Plasma Sources Science and Technology | 1998年 / 7卷 / 02期
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页码：179 / 185
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